Product/Service

Single-Unit RF Power System

Single Screw Extruders
Advanced Energy Industries has introduced a fully integrated 13.56 MHz RF power delivery system, designed for process and equipment engineers who use thin-film technology

Advanced Energy Industries has introduced a fully integrated 13.56 MHz RF power delivery system, designed for process and equipment engineers who use thin-film technology. The system was developed for those in the manufacture of semiconductors, data storage devices, and flat panel display products. It provides power repeatability, and increased reliability.

The Apex system eliminates 10-25% power loss inherent in typical component configurations by delivering RF power to the source. The product platform is available in power ranges of 1 kW to 10 kW, and frequencies of 13.56 MHz and 27.12 MHz. The platform also provides pulsed output capability.

Advanced Energy, 1625 Sharp Point Dr., Fort Collins, CO 80525. Phone: 970-221-4670; Fax: 970-221-5583.